Invited Speakers:


Session Date

Invited Speaker

Switches and Components 1



C. Goldsmith

Chuck Goldsmith

Advances in MEMS Capacitive Switch Technology

Abstract - This article overviews improvement in RF MEMS switch robustness against environmental changes and adverse operating conditions. Implementation of molybdenum mechanical membranes have demonstrated a very low change
over temperature of -26 mV/°C on glass substrates and +29 mV/°C on sapphire substrates. Similarly, implementation of ultrananocrystalline diamond as a switch insulator has demonstrated a new paradigm in switch operation and reliability. Data shows that MEMS switches can operate almost continuously (99.99995% on-time) with little impact of dielectric charging on switch operation.



Chuck Goldsmith formed MEMtronics Corporation in 2001, where he is currently pursuing business opportunities for RF MEMS in the commercial and defense markets.  He has been involved in the design and development of microwave/millimeter-wave circuits and subsystems for over 20 years.  He has been employed by M/A COM, Texas Instruments, and Raytheon Company.

Dr. Goldsmith has been developing RF MEMS devices and circuits since 1993, and is the inventor of the capacitive membrane RF MEMS switch.  He has spent the last decade dedicated to the development and application of this technology.   These activities include the innovation of switches, phase shifters, and tunable antennas for radar and satcom applications, as well as variable capacitors and tunable filters for microwave receiver front-ends.

Dr. Goldsmith has authored or co-authored over 45 publications on microwave circuits, photonics, and RF MEMS.  He is also inventor or co-inventor of nine granted and one pending patents in related fields.  He has been the guest editor for three “Special Issues on RF Applications of MEMS Technology” for the International Journal of RF and Microwave Computer-Aided Engineering (Wiley – 1999, 2001, and 2004).  Dr. Goldsmith is a Fellow of the IEEE (Microwave Theory & Techniques Society and Electron Device Society) and a member of Tau Beta Pi.  He has served as Chairman and Vice-Chairman of the IEEE LEOS Dallas Chapter, and has previously served as Chairman of the IEEE MTT Technical Coordinating Committee (TCC-21) on RF MEMS, of which he is still a member.



RFIC Integration


29/06/2010 11:15

R. Mansour

Raafat Mansour

Integrated RF MEMS/CMOS Devices

Abstract - A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS devices with parallel-plate structure including tunable capacitors with a high quality factor and a very compact size and capacitive RF MEMS switches. Simulations and measured results are presented for several RF MEMS/CMOS devices. Parallel-plate tunable capacitors are presented with quality factor better than 300 at 1.5 GHz and high tuning range. A 2-pole coupled line tunable bandpass filter with a center frequency of 9.5 GHz is also designed, fabricated and tested. A tuning range of 17% is achieved using integrated variable MEMS/CMOS capacitors with a quality factor exceeding 20 at 10 GHz. The tunable filter occupies a chip area of 1.2 × 2.1 mm2. Capacitive type RF MEMS switches are fabricated using standard CMOS technology based on a warped-plate structure. The insertion loss of the switch is less than 1.41 dB up to 20 GHz, and the isolation is 19-40 dB across the frequency band from 10 to 20 GHz. A single-chip reconfigurable amplifier is also demonstrated that utilizes MEMS/CMOS tunable capacitors for input and output matching circuits. The amplifier achieves maximum power gain under variable source and load impedances by using the integrated tunable matching circuits.



Raafat Mansour is Professor of Electrical and Computer Engineering at the University of Waterloo where he holds an NSERC/COM DEV Industrial Research Chair on RF Engineering.  He is the founding Director of the Center for Integrated RF Engineering at the University of Waterloo (  Prof. Mansour currently leads a research group consisting of 25 Ph.D and M.A.Sc graduate students and postdoctoral fellows. Prior to joining the University of Waterloo in 1999, Dr. Mansour was with COM DEV, Cambridge, Ontario, Canada over the period 1986-1999, where he progressed through various technical and management positions in COM DEV’s Corporate R&D Department.

Throughout his industrial and academic career, Dr. Mansour has been able to successfully apply theoretical solutions to practical problems to address issues of key interest to the RF and MEMS engineering communities. Dr. Mansour holds 31 US and Canadian patents to his credit (25 awarded and 6 pending. He has more than 200 publications and co-author of a Wiley book Published in July 2007 and has contributed 4 chapters to two other books. Dr. Mansour received several Best Paper Awards and outstanding research performance awards both from COM DEV and the University of Waterloo. Dr. Mansour is a Fellow of the IEEE, a Fellow of the Canadian Academy of Engineering (CAE) and a Fellow of Engineering Institute of Canada (EIC).


Fabrication, Process, Reliability and Testing

29/06/2010 14:30

N. Tamotsu

Nishino Tamotsu

Recent activity of RF-MEMS development in Japan

Abstract - This paper introduces recent research and
development activities of RF-MEMS in Japan. The activities cover R&D in national project, industrial companies and academic affiliations.



He received the B.E. and M.E. degrees in electrical engineering from Waseda University, Tokyo, Japan, in 1989 and 1991, respectively.
He received Ph.D degree in electrical engineering from the University of California, Los Angeles in 2002.
In 1991, He joined Mitsubishi Electric Corporation, where he has been engaged in research and development of antenna feeds systems, microwave amplifiers, microwave control circuits, microwave module integration, horn antennas and array antennas.
He also was engaged in production of cellular phones in 2007 and 2008.
Now he is a manager of array antenna team in the R&D center.
He was a visiting scholar at the University of California, Los Angeles from 1996 to 1997.

Invited Talks

30/06/2010 9:00

Benedetto Vigna


The MEMS Metamorphosis






Invited Talks
30/06/2010 9:30

Thomas Sommer

Thomas Sommer

Evolution of underlying technologies for networked smart systems: a prerequisite for the Internet of smart Things






Invited Talks
30/06/2010 10:00

S. Gevorgian

Spartak Gevorgian

Switchable/Tuneable FBARs: Status and potential

Abstract - The Film Bulk Acoustic Wave Resonators (FBAR), especially AlN based, are one of the success stories of the recent years. Fig.1a shows the progress in FBARs in terms of Q-factor. A considerable understanding is achieved in the field, even though there are some issues that have to be addressed. The trimming and/or tuning are one of the main issues. The trimming by etching takes care of the processing tolerances. It is a costly process. Tuning is a cost effective way that, in addition to “trimming”, offers radically new RF system architectures. The current state and potential of the electrically tunable FBAR based on ferroelectrics are considered in this presentation.



Has got his masters degree in radio engineering from Polytechnic Institute, Yerevan, Armenia in 1972, PhD (1977) and Dr. Sci. (1991) degrees from Electrical Engineering University, S. Petersburg , Russia.

His research focus is in new materials and physical phenomena, considered for device applications, including microwave semiconductor devices and integrated circuits, microwave photonics, integrated optics and high temperature superconductors. Tuneable microwave devices based on ferroelectrics and microwave integrated circuits have been the main subject in the last 10 years both at Chalmers University and Ericsson Research.

Gevorgian is author/co-author of the books “Ferroelectrics in Microwave Devices, Circuits and Systems” (Springer 2009), “Glass Based Integrated Optics” (Energoizdat, 1991) and more than 300 journal and conferences papers and more than 30 patents and patent applications. He is a member of IEEE MTT, EuMA and Academy of Sciences of Armenia. He is a Fellow IEEE, Distinguished Lecturer for the IEEE MTT Society. At present he is a Professor at Chalmers University of Technology, and has part time employment at Ericsson AB, Moelndal, Sweden.


RF-MEMS in Space


F. Deborgies

François Deborgies

ESA RF MEMS activities: An overview

Abstract -


François Deborgies graduated from Ecole Supérieure d’Electricité, France, in 1984 and received the M.Sc. in microwaves and modern optics from University College London, U.K., in 1985. In 1986, he joined the Central Research Laboratory (LCR) of Thomson-CSF (now Thales) in Corbeville, France. Within the Optical Link Laboratory, he has worked in the field of microwave photonics, and more specifically on high frequency optoelectronic components and high-performance microwave optical links. He was responsible for the characterisation of multi-gigahertz optoelectronics components and has also been involved in the design and realisation of systems based on high-speed optoelectronics. In  1998, became Head of the Microwave Modules Laboratory, which was concentrating on innovative packaging technologies up to millimetre-wave frequencies. During his time at LCR, he participated to several different European projects, in the frame of Esprit, RACE, ACTS,... In 2001, he joined the European Space Agency (ESA). Since then, he has been Head of the Microwave and Millimetre-wave Section within the RF Payload Systems Division of the European Space Research and Technology Centre (ESTEC), Noordwijk, The Netherlands. The section covers a wide range of frequencies from below 1 GHz to almost 1 THz, from components to equipment and sub-systems for all space applications (Telecom, Earth Observation, Navigation and Science). His current topics of interest are as varied as MMICs, SAW devices, MEMS, microwave packaging,… François Deborgies holds several patents.




RF-MEMS in Space


30/06/2010 15:45

V. Ziegler
Volker Ziegler

System requirements and achievements for RF-MEMS in space

Abstract - This paper presents an overview of the system requirements and achievements for RF-MEMS based microwave circuits in the space domain. Very promising applications, like switch-matrices in reconfigurable antenna systems and substrate-integrated filters or frequency-agile amplifiers in miniaturized multi-band modules are discussed.
Additionally, their different requirements in terms of RFperformance and reliability are highlighted. Some RF-MEMS demonstrators already built and achievements made by EADS InnovationWorks are presented.


Volker Ziegler received his Dipl.-Ing. degree in electrical engineering and his Dr.-Ing. degree (with honors) both from the University of Ulm, Germany, in 1997 and 2001, respectively.
In 2002, he was working at the University of Michigan, Ann Arbor, USA on the design of GaN high-power MMICs and at United Monolithic Semiconductors, Orsay, France on the modeling and characterisation of III-V semiconductor devices.
Since January 2003, he is working with the EADS Innovation Works, Ottobrunn, Germany. He is an EADS Expert for "Microwave Technologies and Systems" and is responsible for the acquisition and managing of research projects in the field of key microwave technologies for advanced radar and communication systems.
Volker Ziegler is senior member of the IEEE and member of the IEEE MTT-S Technical Coordinating Committee 21 on RF-MEMS. He authored or co-authored more than 50 papers and holds three patents.